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Proceedings Paper

Fabrication of nanometer scale structures
Author(s): Mahir A. Nayfeh
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Paper Details

Date Published: 3 October 1993
PDF: 18 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100C (3 October 1993); doi: 10.1117/12.183186
Show Author Affiliations
Mahir A. Nayfeh, Univ. of Illinois, Urbana-Champaign (United States)

Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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