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Proceedings Paper

Interferometer with phase modulation for displacement sensor testing
Author(s): Alexander A. Andreev; Lev N. Butenko; Alexander G. Seregin; Ilya Sh. Etsin
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Paper Abstract

Phase modulation interferometer with the phase difference computed from the ratio of the first and second harmonics amplitudes has been developed. Signal distortions and deviations of measuring conditions against normal conditions are analyzed and appropriate corrections are made. The instrumental error of small displacement measurements is equal to +/- 0.8 nm (0.95). The digital readout interval is of 1 nm.

Paper Details

Date Published: 10 August 1994
PDF: 4 pages
Proc. SPIE 2097, Laser Applications, (10 August 1994); doi: 10.1117/12.183151
Show Author Affiliations
Alexander A. Andreev, S.I. Vavilov State Optical Institute (Russia)
Lev N. Butenko, S.I. Vavilov State Optical Institute (Russia)
Alexander G. Seregin, S.I. Vavilov State Optical Institute (Russia)
Ilya Sh. Etsin, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 2097:
Laser Applications
Artur A. Mak, Editor(s)

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