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Proceedings Paper

Laser writing: a new technique for fabrication of electronic and optoelectronic Y-Ba-Cu-O devices and circuits
Author(s): W. Xiong; Witold Kula; Roman Sobolewski; J. R. Gavaler
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Paper Abstract

We report our studies on the fabrication of YBa2Cu3Ox (YBCO) thin-film structures, patterned with a laser-writing technique. We demonstrate that this patterning method can be successfully implemented in fabricating a variety of electronic and optoelectronic high-Tc devices and circuits. Laser patterning implements a focused beam from a continuous-wave Ar- ion laser to selectively heat-up an epitaxial YBCO film in a controlled (oxygen or oxygen-free) atmosphere. Depending on the film's initial oxygen content and the ambient atmosphere, laser heating allows oxygen to diffuse in or out of the annealed region and form oxygen-rich (YBa2Cu3O7; superconducting) patterns next to oxygen-depleted (YBa2Cu3O6; insulating at low temperature) ones. The width of the YBa2Cu3O7- YBa2Cu3O6 interface is less than 1 micrometers . The laser-writing procedure is noninvasive, does not require a patterning mask, and results in completely planar, monolithic structures, free of surface contamination or edge degradation. Our oxygen-rich lines (typically 4 to 60 micrometers wide), patterned on the high-quality, intentionally deoxygenated YBCO films, exhibit zero resistivity at 90 K and critical current density of approximately 3 MA/cm2 at 77 K. Their superconducting properties remain unchanged even after eight months of shelf storage. On the other hand, oxygen-poor regions are semiconducting and characterized at low temperatures by a 3D, variable-length hopping transport. Below 100 K, they exhibit low microwave losses, their dc resistance is above 10 M(Omega) /square, and dielectric permittivity is below 20 at about 10 GHz. A number of devices and circuits patterned by laser writing, such as a microbridge, coplanar transmission line, open- ended coplanar microwave resonator, photoconductive switch, and YBCO field-effect transistor, are presented. All structures are intrinsic to the YBCO material, and they combine in a new and unique way superconducting and dielectric properties of the YBa2Cu3O7 and YBa2Cu3O6 phases.

Paper Details

Date Published: 2 July 1994
PDF: 9 pages
Proc. SPIE 2160, Superconductive Devices and Circuits, (2 July 1994); doi: 10.1117/12.181003
Show Author Affiliations
W. Xiong, Univ. of Rochester (United States)
Witold Kula, Univ. of Rochester (United States)
Roman Sobolewski, Univ. of Rochester (United States)
J. R. Gavaler, Westinghouse Science and Technology Ctr. (United States)

Published in SPIE Proceedings Vol. 2160:
Superconductive Devices and Circuits
Robert A. Buhrman; John T. Clarke; Ken Daly; Roger H. Koch; Jerome A. Luine; Randy W. Simon, Editor(s)

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