The microfabrication of optical and micromechanical elements requires a high degree of accuracy in order to obtain the required efficiency in the functionality of the element. An easy, nondestructive 3D characterization of the batch fabricated elements after each fabrication step is needed to ensure a reliable engineering control over the whole process. We demonstrate the versatility of a stand-alone AFM which can be used as a flexible tool for the nondestructive characterization of all steps of a fabrication sequence of microfabricated optical and micromechanical elements without the necessity to specially prepare the samples under test.

Date Published: 28 July 1994
PDF: 6 pages
Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180984

Published in SPIE Proceedings Vol. 2213:
Nanofabrication Technologies and Device Integration
Wolfgang Karthe, Editor(s)