Share Email Print
cover

Proceedings Paper

Laser writing of optical waveguides in sol-gel films
Author(s): Stefano Pelli; Giancarlo C. Righini; Alessandro Verciani; Massimo Guglielmi; Alessandro Martucci; Antonio Scaglione
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Laser heating can be used to fully densify selected areas of a partially densified sol-gel film deposited onto a glass substrate, thus substituting the conventional heat treatment in an oven. Here the topographic and optical characteristics of strip waveguides produced in a SiO2-TiO2 film by direct writing with a focused CO2 laser are presented, and the critical parameters of the process discussed.

Paper Details

Date Published: 28 July 1994
PDF: 6 pages
Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180983
Show Author Affiliations
Stefano Pelli, IROE-CNR (Italy)
Giancarlo C. Righini, IROE-CNR (Italy)
Alessandro Verciani, IROE-CNR (Italy)
Massimo Guglielmi, Univ. di Padova (Italy)
Alessandro Martucci, Univ. di Padova (Italy)
Antonio Scaglione, Univ. di Salerno (Italy)


Published in SPIE Proceedings Vol. 2213:
Nanofabrication Technologies and Device Integration
Wolfgang Karthe, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray