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Proceedings Paper

Grid polarizer for the visible spectral region
Author(s): Bernd Stenkamp; Michael Abraham; Wolfgang Ehrfeld; Erwin Knapek; M. Hintermaier; Michael T. Gale; Rudolph H. Morf
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Paper Abstract

We report on the fabrication of a grid polarizer for the visible spectral region, based on metallic grids with periods below 100 nm. Theoretical calculations of the degree of polarization predict useful values for the visible region, if the period is in the range of 100 nm. The properties of the polarizer are shown to be strongly dependent on the optical constants of the metal and the substrate. For the fabrication of the grids, direct e-beam writing in combination with a dry etching process has been used. Metallic grids with 50 nm lines and a period of 100 nm were fabricated on a glass substrate. Measurements of the degree polarization were made at a wavelength of 670 nm. The results are compared to theoretical calculations made in the framework of a rigorous diffraction theory.

Paper Details

Date Published: 28 July 1994
PDF: 9 pages
Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180973
Show Author Affiliations
Bernd Stenkamp, IMM Institut fuer Mikrotechnik GmbH (Germany)
Michael Abraham, IMM Institut fuer Mikrotechnik GmbH (Germany)
Wolfgang Ehrfeld, IMM Institut fuer Mikrotechnik GmbH (Germany)
Erwin Knapek, Siemens AG Corporate Research (Germany)
M. Hintermaier, Siemens AG Corporate Research (Germany)
Michael T. Gale, Paul Scherrer Institute (Switzerland)
Rudolph H. Morf, Paul Scherrer Institute (Switzerland)

Published in SPIE Proceedings Vol. 2213:
Nanofabrication Technologies and Device Integration
Wolfgang Karthe, Editor(s)

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