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Proceedings Paper

Producibility advances in hybrid uncooled infrared detectors
Author(s): Robert A. Owen; James F. Belcher; Howard R. Beratan; Steve N. Frank
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Paper Abstract

Several key process developments advance the state-of-the-art in hybrid, uncooled IR detector fabrication. Following a four year producibility roadmap, ion mill reticulation, wafer processing, and standard semiconductor processes are nearing implementation. The discussion describes several proof-of-principle experiments and their results and contrasts the current process approach against an existing, detailed process model. As the thrust continues towards low cost, high volume production, emphasis remains on simultaneous performance improvements. The analyses and preliminary data show that both moderate performance and low detector cost are quite obtainable with the strategies identified.

Paper Details

Date Published: 15 July 1994
PDF: 8 pages
Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); doi: 10.1117/12.179686
Show Author Affiliations
Robert A. Owen, Texas Instruments Inc. (United States)
James F. Belcher, Texas Instruments Inc. (United States)
Howard R. Beratan, Texas Instruments Inc. (United States)
Steve N. Frank, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 2225:
Infrared Detectors and Focal Plane Arrays III
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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