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Proceedings Paper

Lateral diffusion studies by laser ablation microprobe mass spectrometry
Author(s): Lou Ann Heimbrook
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Paper Abstract

This paper examines the analytical capabilities and applications of Laser Ablation Microprobe Mass Spectrometry (LAMMS). The technique and instrumentation will be described along with the application of LAMMS to investigate dopant lateral diffusion problems in insulating and noninsulating materials. This work focuses on two material examples: p+ and n+ diffusion within 3 μm device lines in Ta and Co silicides; and trace element and dopant migration in optical fibers. The results show the capability of LAMMS to routinely achieve 1-3 μm lateral resolution with high dopant sensitivity on materials with extremely different optical properties.

Paper Details

Date Published: 1 July 1990
PDF: 11 pages
Proc. SPIE 1208, Laser Photoionization and Desorption Surface Analysis Techniques, (1 July 1990); doi: 10.1117/12.17869
Show Author Affiliations
Lou Ann Heimbrook, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1208:
Laser Photoionization and Desorption Surface Analysis Techniques
Nicholas S. Nogar, Editor(s)

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