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Proceedings Paper

Optical diagnostics of diamond CVD plasmas
Author(s): Jay B. Jeffries; George A. Raiche; Michael S. Brown
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Paper Abstract

Chemical vapor deposition of diamond occurs in a dynamic reacting environment which is far from chemical equilibrium. Real time, in situ, non intrusive diagnostics of the reacting gas mixture are needed to develop and test models of the chemical mechanism of diamond growth. We demonstrate the use of laser- induced fluorescence to probe the rotational state distribution in diamond depositing dc-arc-jet plasma to infer the gas temperature which is required to model the chemistry. Compensation for collision dynamics of the laser-excited state plays an important role in the determination of accurate and precise gas temperatures.

Paper Details

Date Published: 17 June 1994
PDF: 8 pages
Proc. SPIE 2124, Laser Techniques for State-Selected and State-to-State Chemistry II, (17 June 1994); doi: 10.1117/12.178101
Show Author Affiliations
Jay B. Jeffries, SRI International (United States)
George A. Raiche, SRI International (United States)
Michael S. Brown, SRI International (United States)

Published in SPIE Proceedings Vol. 2124:
Laser Techniques for State-Selected and State-to-State Chemistry II
John W. Hepburn, Editor(s)

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