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Proceedings Paper

Fabricating spherical microlens arrays with a two-step laser beam writing technique
Author(s): Georges Przyrembel
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Paper Abstract

The fabrication process of refractive microlens arrays with a continuous surface relief is described. The elements are fabricated with a laser beam lithographic system and are directly written into photoresist. By this method the manufacturing of lenses with a broad range of numerical apertures N.A. is possible. Lenses with different diameters in the range from 25 to 100micrometers were written in photoresist. Furthermore, a modified technique with two subsequent exposures is applied which simplifies the procedure for generating the data and writing the lens topography. First attempts to transfer the structures into the substrate by ion etching show positive results. A first suggested fabrication method of the spherical microlenses by an exposure technique using a z-stepped probe chuck is also discussed.

Paper Details

Date Published: 17 June 1994
PDF: 7 pages
Proc. SPIE 2152, Diffractive and Holographic Optics Technology, (17 June 1994); doi: 10.1117/12.178087
Show Author Affiliations
Georges Przyrembel, Heinrich-Hertz-Institute fuer Nachrichtentechnik (Germany)

Published in SPIE Proceedings Vol. 2152:
Diffractive and Holographic Optics Technology
Ivan Cindrich; Sing H. Lee, Editor(s)

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