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Proceedings Paper

Integrated silica-based optical switch for radar phase control
Author(s): Lily Y. Pang; Jerry L. Leonard Jr.; Gregory A. Magel; Susan Marie Eshelman; Tseng-Hwang Lin
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Paper Abstract

The development of low-loss, low-cost integrated optical switches is critical for radar phase control applications. We report recent progress in integrated phosphorous-doped SiO2 on Si (PSG) waveguide optical routing switches based on electro-static actuation of an aluminum membrane. We have demonstrated the membrane switching concept and its implementation feasibility with a Mach-Zehnder interferometer and a deposited aluminum thin film. Without the metal film, 95% of the output light was measured in the cross channel, with a channel crosstalk of -13.37 dB. With a 3 mm long aluminum film being deposited on one of the interferometer arms as a phase shifter, 94% of the output light was measured in bar channel. The switch structure is currently being optimized for better performance, and a deformable aluminum membrane switch is being developed.

Paper Details

Date Published: 17 June 1994
PDF: 9 pages
Proc. SPIE 2236, Transition of Optical Processing into Systems 1994, (17 June 1994); doi: 10.1117/12.178054
Show Author Affiliations
Lily Y. Pang, Texas Instruments Inc. (United States)
Jerry L. Leonard Jr., Texas Instruments Inc. (United States)
Gregory A. Magel, Texas Instruments Inc. (United States)
Susan Marie Eshelman, Texas Instruments Inc. (United States)
Tseng-Hwang Lin, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 2236:
Transition of Optical Processing into Systems 1994
David P. Casasent, Editor(s)

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