The development of low-loss, low-cost integrated optical switches is critical for radar phase control applications. We report recent progress in integrated phosphorous-doped SiO₂ on Si (PSG) waveguide optical routing switches based on electro-static actuation of an aluminum membrane. We have demonstrated the membrane switching concept and its implementation feasibility with a Mach-Zehnder interferometer and a deposited aluminum thin film. Without the metal film, 95% of the output light was measured in the cross channel, with a channel crosstalk of -13.37 dB. With a 3 mm long aluminum film being deposited on one of the interferometer arms as a phase shifter, 94% of the output light was measured in bar channel. The switch structure is currently being optimized for better performance, and a deformable aluminum membrane switch is being developed.

Date Published: 17 June 1994
PDF: 9 pages
Proc. SPIE 2236, Transition of Optical Processing into Systems 1994, (17 June 1994); doi: 10.1117/12.178054

Published in SPIE Proceedings Vol. 2236:
Transition of Optical Processing into Systems 1994
David P. Casasent, Editor(s)