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Proceedings Paper

Processing of HTcS antenna microbolometers
Author(s): Sergei A. Zhgoon; Valery Georgievic Yakunin; Vladimir A. Ananchenko; Jacques Joffrin; Jean-Yves Prieur
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Paper Abstract

Dry and wet photolithography has been used to define metal elements with YBCO thin film microbolometers. I-NaI concentrated solution was found suitable to etch gold layouts on the top of YBCO layer without noticeable reaction. The wet and dry processes were found to give comparable devices performances, while the wet process is easier to reproduce.

Paper Details

Date Published: 20 May 1994
PDF: 6 pages
Proc. SPIE 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric, (20 May 1994); doi: 10.1117/12.176144
Show Author Affiliations
Sergei A. Zhgoon, Moscow Power Engineering Institute (Russia)
Valery Georgievic Yakunin, Lomonosov State Univ. of Moscow (Russia)
Vladimir A. Ananchenko, Lomonosov State Univ. of Moscow (Russia)
Jacques Joffrin, Univ. Paris-Sud (France)
Jean-Yves Prieur, Univ. Paris-Sud (France)

Published in SPIE Proceedings Vol. 2159:
High-Temperature Superconducting Detectors: Bolometric and Nonbolometric
Michael Nahum; Jean-Claude Villegier, Editor(s)

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