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Proceedings Paper

Pyrolysis of novel and safe phosphorous sources for chemical beam epitaxy applications
Author(s): C. W. Hill; Laurence P. Sadwick; C. W. Kim; H. H. Ryu; Gerald B. Stringfellow
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Paper Abstract

It is well known that PH3 is highly toxic and safer alternatives need to be found. TBP has a favorable vapor pressure at room temperature and decomposes at a lower temperature than PH3. Results of a systematic investigation of the pyrolysis of novel phosphorous (P) precursors for chemical beam epitaxy (CBE) that are safer than phosphine are presented. In particular, three topics pertinent to CBE are presented: (1) technical details on the pyrolysis conditions and growth using several novel condensed-phase P-precursors, including tertiarybutylphosphine (TBP); (2) a custom-designed gas-source group V cracker cell; and (3) methods to reduce the cracking temperature of P-containing sources.

Paper Details

Date Published: 11 May 1994
PDF: 11 pages
Proc. SPIE 2140, Epitaxial Growth Processes, (11 May 1994); doi: 10.1117/12.175792
Show Author Affiliations
C. W. Hill, Univ. of Utah (United States)
Laurence P. Sadwick, Univ. of Utah (United States)
C. W. Kim, Univ. of Utah (United States)
H. H. Ryu, Univ. of Utah (United States)
Gerald B. Stringfellow, Univ. of Utah (United States)

Published in SPIE Proceedings Vol. 2140:
Epitaxial Growth Processes
Chris J. Palmstrom; Maria C. Tamargo, Editor(s)

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