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Proceedings Paper

1:1 catadioptric deep-UV optics with a full-circle available field
Author(s): Yudong Zhang
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Paper Abstract

Several kinds of 1:1 catadioptric optical systems with a circle field and an obscuration aperture are described in this paper. Their available working field is a full circle which is at least twice as large as that of the previous 1:1 catadioptric optical systems.

Paper Details

Date Published: 17 May 1994
PDF: 13 pages
Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); doi: 10.1117/12.175481
Show Author Affiliations
Yudong Zhang, Fujian Institute of Research on the Structure of Matter (China)

Published in SPIE Proceedings Vol. 2197:
Optical/Laser Microlithography VII
Timothy A. Brunner, Editor(s)

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