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Proceedings Paper

Design and whole-wafer performance of separate absorption, grading, charge, and multiplication InP/InGaAs avalanche photodiodes
Author(s): Larry E. Tarof; Jeffrey C. Yu; Robert Bruce; D. G. Knight; T. Baird; Kumar Visvanatha; D. McGahn; B. Emmerstorfer; C. L.F. Ma; Cheryl M. Maritan; Carla J. Miner
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Paper Abstract

Avalanche photodiodes (APDs) are required for long distance fiber optical systems at wavelengths of 1.3 and 1.55 micrometers . Presently deployed systems operate at speeds up to 2.4 Gb/s, with increasing volumes. It is becoming increasingly necessary to produce low-cost, high-performance planar APDs. Most commercial InP/InGaAs APDs employ a separate absorption, grading, and multiplication (SAGM) design. However, this approach has severe process limitations for obtaining functioning APDs. Greater growth and processing flexibility is obtained from the separate absorption, grading, charge and multiplication (SAGCM) APD. In this work the influence of the layer thicknesses, junction depth and doping on the performance of SAGCM APDs is described both theoretically and experimentally. Theoretically, an analytical model of the (delta) -doped (ideal SAGCM) APD is presented, both neglecting and taking into account ionization in the InGaAs. In addition to the performance predictions with respect to fabrication parameters, this model also predicts that the gain depends on the wavelength of light (e.g. 1.3 or 1.55 micrometers ). Experimentally, whole 2-inch wafer performance results are interpreted with respect to variations in growth and processing parameters. The results are in good agreement with the predictions of the model.

Paper Details

Date Published: 2 May 1994
PDF: 12 pages
Proc. SPIE 2149, Technologies for Optical Fiber Communications, (2 May 1994); doi: 10.1117/12.175269
Show Author Affiliations
Larry E. Tarof, Bell-Northern Research Ltd. (Canada)
Jeffrey C. Yu, Bell-Northern Research Ltd. (Canada)
Robert Bruce, Bell-Northern Research Ltd. (Canada)
D. G. Knight, Bell-Northern Research Ltd. (Canada)
T. Baird, Northern Telecom Ltd. (Canada)
Kumar Visvanatha, Bell-Northern Research Ltd. (Canada)
D. McGahn, Bell-Northern Research Ltd. (Canada)
B. Emmerstorfer, Bell-Northern Research Ltd. (Canada)
C. L.F. Ma, Simon Fraser Univ. (Canada)
Cheryl M. Maritan, Bell-Northern Research Ltd. (Canada)
Carla J. Miner, Bell-Northern Research Ltd. (Canada)

Published in SPIE Proceedings Vol. 2149:
Technologies for Optical Fiber Communications
Gail J. Brown; Susan R. Sloan; Kenneth D. Pedrotti; Didier J. Decoster; Didier J. Decoster; Joanne S. LaCourse; Yoon-Soo Park; Kenneth D. Pedrotti; Susan R. Sloan, Editor(s)

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