Share Email Print
cover

Proceedings Paper

Vacuum-arc plasma-beam motion in curved magnetic fields
Author(s): Evgeny Gidalevich; Samuel Goldsmith; Raymond Boxman
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A theoretical model is presented for transport of vacuum arc generated metal vapor plasma through a magnetized quarter-tours duct used for filtering out macroparticles in order to deposit high quality thin films. The model utilizes a two fluid approximation which takes into account collisions among the plasma particles. It is found that centrifugal forces must lead to a charge separation generated field, that determines plasma drift in the centrifugal force direction to the duct wall and give rise to ion loss. Another cause for plasma is the plasma pressure gradient. The plasma output flux is an increasing function of the magnetic field strength. The plasma flux in the output plane is asymmetrically skewed to favor the outside half. A further asymmetry in the flux distribution in the direction of the torroidal axis of symmetry is introduced if ions of different charge states are present in the plasma.

Paper Details

Date Published: 1 May 1994
PDF: 6 pages
Proc. SPIE 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum, (1 May 1994); doi: 10.1117/12.174623
Show Author Affiliations
Evgeny Gidalevich, Tel Aviv Univ. (Israel)
Samuel Goldsmith, Tel Aviv Univ. (Israel)
Raymond Boxman, Tel Aviv Univ. (Israel)


Published in SPIE Proceedings Vol. 2259:
XVI International Symposium on Discharges and Electrical Insulation in Vacuum
Gennady A. Mesyats, Editor(s)

© SPIE. Terms of Use
Back to Top