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Proceedings Paper

Plasma flare of pulsed-microwave surface discharge in vacuum for thin film deposition and materials processing
Author(s): Alexander A. Ravaev; Alexander V. Medvedovsky; Pavel S. Chernyshev
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Paper Abstract

The present report consists of three parts. The first one is a brief review of experimental works accomplished in MRT Institute and devoted to a study of nonlinear interaction of strong microwaves (in X-band at intensities of 0.01 - 10 MW/cm2 and pulse duration from 50 - 100 nsec up to 1 - 10 microseconds) with a plasma flare, and of attendant physical processes. The small experimental plasma reactor bench is described in the second part. And the third part of our report reflects the first qualitative experiments on pulsed microwave deposition of thin carbon and metal films on various substrates. Obtained practical results and technique perspectives are discussed in detail.

Paper Details

Date Published: 1 May 1994
PDF: 4 pages
Proc. SPIE 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum, (1 May 1994); doi: 10.1117/12.174599
Show Author Affiliations
Alexander A. Ravaev, Moscow Radiotechnical Institute (Russia)
Alexander V. Medvedovsky, Moscow Radiotechnical Institute (Russia)
Pavel S. Chernyshev, Moscow Radiotechnical Institute (Russia)

Published in SPIE Proceedings Vol. 2259:
XVI International Symposium on Discharges and Electrical Insulation in Vacuum
Gennady A. Mesyats, Editor(s)

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