Share Email Print

Proceedings Paper

Advantages of pulse counting in microchannel plate detectors
Author(s): Steven R. Rogers
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The output signal from a multichannel plate detector (MCP) can be processed by one of two methods: pulse counting or charge accumulation. For a two-stage MCP, the output signal-to- noise ratio is nearly twice as great for pulse counting. This represents a significant advantage in low count-rate applications, such as e-beam metrology of non-conducting specimens.

Paper Details

Date Published: 1 May 1994
PDF: 2 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174158
Show Author Affiliations
Steven R. Rogers, Opal Technologies Ltd. (United States)

Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?