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Proceedings Paper

Development of a deep-UV Mirau correlation microscope
Author(s): Fang Cheng Chang; Gordon S. Kino; William K. Studenmund
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Paper Abstract

Progress is being made on the development of a deep UV interferometric microscope to operate at a wavelength of 248 nm. The eventual aim is to make measurements of 0.18 - 0.25 micrometers gate structures. The microscope employs a mercury vapor light source, an image intensifier with a CCD or vidicon camera, and quartz lenses. The device is based on the Mirau correlation microscope, and uses a Mirau interferometer with a new type of radially sectored beamsplitter. Feasibility has been demonstrated.

Paper Details

Date Published: 1 May 1994
PDF: 12 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994);
Show Author Affiliations
Fang Cheng Chang, Stanford Univ. (United States)
Gordon S. Kino, Stanford Univ. (United States)
William K. Studenmund, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

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