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Proceedings Paper

Effects of dissimilar materials on submicron linewidth measurements from phase images
Author(s): Yiping Xu
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Paper Abstract

We investigated the effect of dissimilar materials on submicron linewidth measurements that are made from phase images. When the relative reflectivity is low, errors are introduced into linewidth measurements made directly from phase images. Two calibration algorithms were developed based on the theoretical modeling of a partially coherent optical system. There was good agreement between the experimental results and the theoretical predictions.

Paper Details

Date Published: 1 May 1994
PDF: 11 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174137
Show Author Affiliations
Yiping Xu, WYKO Corp. (United States)


Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

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