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Proceedings Paper

CD-SEM metrology using BSE detection
Author(s): Alon Litman; Asher Pearl; Steven R. Rogers
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Paper Abstract

The characteristics of BSE emission at low beam energies (0.5 to 5 kV) are discussed with reference to signal intensity, topographic contrast, material contrast, charging phenomena, and metrology issues. Experimental results are presented for a back-scattered electron (BSE) detector that has been developed for viewing deep trenches and high-aspect contact holes in the CD-SEM metrology applications.

Paper Details

Date Published: 1 May 1994
PDF: 10 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174121
Show Author Affiliations
Alon Litman, OPAL Technologies Ltd. (Israel)
Asher Pearl, OPAL Technologies Ltd. (Israel)
Steven R. Rogers, OPAL Technologies Ltd. (Israel)

Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

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