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Proceedings Paper

Very large precision mask manufacturing: an innovative approach
Author(s): Graciela R. Guel
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Paper Abstract

State-of-the-Art Very Large Precision Masks (VLPMs) manufacture is presented in this paper, including the inspection and repair of these Cr/glass VLPMs. The plates were manufactured by using custom designed and constructed Large Area Stepper and Large Area Inspection and Repair System. VLPMs with stepping precision of 0.25 micrometers and critical dimension as small as 2 micrometers in an effective area of 508 mm X 508 mm have been produced using the Large Area Stepper. The Inspection and Repair system measures CDs and defect density. The custom designed software allows the operator to mark the defect type and its position, therefore the Inspection and Repair system is able to automatically repair dark defects by evaporating the chrome with a YAG laser, and clear defects by using laser enhanced metal deposition. Using these custom systems, defect free VLPMs were manufactured. VLPMs are used in the production of Flat Panel Displays, circuit boards or any other large effective area lithographic application. Flat panel display production costs are reduced by substituting stepping lithography by contact or projection lithography using VLPMs.

Paper Details

Date Published: 1 April 1994
PDF: 6 pages
Proc. SPIE 2174, Advanced Flat Panel Display Technologies, (1 April 1994); doi: 10.1117/12.172150
Show Author Affiliations
Graciela R. Guel, Microphase Labs., Inc. (United States)


Published in SPIE Proceedings Vol. 2174:
Advanced Flat Panel Display Technologies
Peter S. Friedman, Editor(s)

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