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Proceedings Paper

Development of integrating radiation imagers with diamond MIS devices
Author(s): Mike Marchywka; Steven C. Binari; Pehr E. Pehrsson; J. Daniel Moses
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Paper Abstract

Diamond has long been recognized as a promising material to fabricate robust, solar-blind radiation detectors. In this work, we present initial results from our program to fabricate a 2D imager using synthetic diamond. We observed the desired low dark current and spectral response properties in MSM detectors made on type-IIa diamond and integrating photoresponse was observed in MIS capacitors fabricated on type IIb diamond. Subsequent modeling of the MIS photoresponse supports the conclusion that electrons are stored at the diamond-insulator interface which makes it feasible to consider a diamond CCD. We discuss relevant processing steps and a plan to make a thin, back-illuminated CCD for VUV and UV imaging applications.

Paper Details

Date Published: 1 April 1994
PDF: 11 pages
Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); doi: 10.1117/12.171756
Show Author Affiliations
Mike Marchywka, Naval Research Lab. (United States)
Steven C. Binari, Naval Research Lab. (United States)
Pehr E. Pehrsson, Naval Research Lab. (United States)
J. Daniel Moses, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 2151:
Diamond-Film Semiconductors
Mike A. Tamor; Mohammad Aslam, Editor(s)

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