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Proceedings Paper

Diffraction moire methods and systems: an overview
Author(s): Vance A. Deason
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Paper Abstract

Diffraction moire interferometry involves the replication of a diffraction grating onto a specimen and the measurement of subsequent distortions of the grating through optical interferometry. The method is elegant, simple, easily applied and yields high quality data. Many devices have been developed to exploit this method, often for very specialized applications. There have also been several attempts to produce general purpose research instruments some of which have been offered commercially.

This paper will attempt to review the historical development of diffraction moire instrumentation, the current state of the art and future directions. A companion paper in this volume (SPIE CR-46) by JS Epstein will give a more complete review of specific uses of the subject.

Paper Details

Date Published: 1 June 1993
PDF: 28 pages
Proc. SPIE 10268, Optical Inspection and Testing: A Critical Review, 1026806 (1 June 1993); doi: 10.1117/12.170179
Show Author Affiliations
Vance A. Deason, Idaho National Engineering Lab. (United States)

Published in SPIE Proceedings Vol. 10268:
Optical Inspection and Testing: A Critical Review
James D. Trolinger, Editor(s)

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