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Proceedings Paper

Absolute noncontacting method to characterize x-ray mirrors with large radii with nanometre accuracy
Author(s): Manohar Virdee
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Paper Abstract

A recent development of the slope integration method in the form of a 2-D laser profilometer system has been applied to measure the figure of reflecting mirrors for x-ray imaging applications. The mirror surfaces were either spherical or paraboloid in form and in some cases could be bent into the required form. The lengths of the surfaces examined varied from 35 mm to 500 mm with sagittas of up to 60 micrometers . At present surfaces with a maximum scan length of 300 mm in 1-D can be measured with an estimated systematic uncertainty of +/- 6 nm for flatness. Over the full angular measurement range of 5 arc minutes the accuracy is slightly reduced. In 2-D, flatness over an area of 100 mm X 100 mm can be measured repeatably with a precision of +/- 2 nm. The angular range of the method has been increased to 1 degree(s) in 1-D to cater to surfaces with radii of about 20 m.

Paper Details

Date Published: 1 February 1993
PDF: 5 pages
Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); doi: 10.1117/12.168067
Show Author Affiliations
Manohar Virdee, National Physical Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 2088:
Laser Dimensional Metrology: Recent Advances for Industrial Application
Michael J. Downs, Editor(s)

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