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Proceedings Paper

Subnanometre precision closed-loop positioning for optics and X-Y stage control using capacitance displacement sensors and piezo-electric actuators
Author(s): Newrick K. Reay
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Paper Abstract

A closed-loop positioning system is described which is capable of sub-nanometer precision over displacements of up to 100 micrometers. The technique utilizes piezo-electric or electrostrictive translators in conjunction with capacitance displacement sensors. It has been applied in optical interferometry for path length control to picometer precision, and in X-Y stages developed for scanning probe microscopy.

Paper Details

Date Published: 1 February 1993
PDF: 10 pages
Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); doi: 10.1117/12.168064
Show Author Affiliations
Newrick K. Reay, Queensgate Instruments Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 2088:
Laser Dimensional Metrology: Recent Advances for Industrial Application
Michael J. Downs, Editor(s)

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