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Proceedings Paper

Optimization of excimer laser-induced x-ray sources for soft x-ray projection lithography
Author(s): Fred Bijkerk; Leonid A. Shmaenok; Eric Louis; A. van Honk; Marnix J. van der Wiel; Y. Y. Platonova; Alexander P. Shevelko; Alexander V. Mitrofanov; Frank Voss; R. Desor; Helmut Frowein; Bernard K. Nikolaus
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Paper Abstract

We report results on high power excimer lasers and their application to generating laser plasma soft x-ray sources. A conversion efficiency of laser light to monochromatized soft x- ray radiation of 0.7% has been achieved at 13.5 nm (2% BW). Two methods to mitigate the production of plasma debris have been analyzed: tape targets and the use of Kr as a buffer gas. The optimal coating thickness of tape targets coated with Ta has been determined as 1 micrometers . Ta tape targets and the Kr buffer were used in a debris contamination test of 105 pulses and evaluated by the loss in reflectivity of a normal incidence Mo-Si multilayer mirror.

Paper Details

Date Published: 1 February 1994
PDF: 4 pages
Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); doi: 10.1117/12.167989
Show Author Affiliations
Fred Bijkerk, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
Leonid A. Shmaenok, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
Eric Louis, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
A. van Honk, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
Marnix J. van der Wiel, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
Y. Y. Platonova, Institute for Applied Physics (Russia)
Alexander P. Shevelko, Lebedev Physical Institute (Russia)
Alexander V. Mitrofanov, Lebedev Physical Institute (Russia)
Frank Voss, Lambda Physik GmbH (Germany)
R. Desor, Lambda Physik GmbH (Germany)
Helmut Frowein, Lambda Physik GmbH (Germany)
Bernard K. Nikolaus, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 2015:
Applications of Laser Plasma Radiation
Martin C. Richardson, Editor(s)

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