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Proceedings Paper

Average velocity distribution measurements of target debris from a laser-produced plasma
Author(s): Howard Bender; Ann Marie Paula Eligon; D. O'Connell; William T. Silfvast
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Paper Abstract

Measurements of the velocity and particulate size distributions as well as calculations of ejected mass have been made on solid Sn and Au laser-produced plasma (LPP) targets. The experiments were conducted under conditions associated with soft x-ray projection lithography (SXPL). Results indicate that small particulates, less than 1 - 2 micrometers in diameter, with speeds in excess of 9000 cm/s, are the dominant constituents of the debris.

Paper Details

Date Published: 1 February 1994
PDF: 5 pages
Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); doi: 10.1117/12.167987
Show Author Affiliations
Howard Bender, CREOL/Univ. of Central Florida (United States)
Ann Marie Paula Eligon, CREOL/Univ. of Central Florida (United States)
D. O'Connell, CREOL/Univ. of Central Florida (United States)
William T. Silfvast, CREOL/Univ. of Central Florida (United States)

Published in SPIE Proceedings Vol. 2015:
Applications of Laser Plasma Radiation
Martin C. Richardson, Editor(s)

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