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Proceedings Paper

Novel process for the fabrication of top-drive double stator micromotor on glass
Author(s): Hocine Ziad; Serge Spirkovitch; Jeannine Marty; Francois Baillieu; Serge Rigo; Neil Milne
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Paper Abstract

A top-drive variable capacitance (VC) electrostatic rotational micromotor with double stator was fabricated combining bulk silicon machining with etch stop on junction to anodic bonding of silicon to glass. The novel process overcomes the drawbacks found in the fabrication of top- drive devices by use of usual surface micromachining of polysilicon LPCVD layers.

Paper Details

Date Published: 1 February 1994
PDF: 7 pages
Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167563
Show Author Affiliations
Hocine Ziad, ESIEE Microelectronics Lab. (France)
Serge Spirkovitch, ESIEE Microelectronics Lab. (France)
Jeannine Marty, ESIEE Microelectronics Lab. (France)
Francois Baillieu, ESIEE Microelectronics Lab. (France)
Serge Rigo, Univ. de Paris VI & VII (France)
Neil Milne, Heriot Watt Univ. (United Kingdom)


Published in SPIE Proceedings Vol. 2045:
Laser-Assisted Fabrication of Thin Films and Microstructures
Ian W. Boyd, Editor(s)

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