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Proceedings Paper

Production of ultrasmooth electroform-replica mirrors for multilayer optics
Author(s): Melville P. Ulmer; Robert I. Altkorn; Rudy H. Haidle; David W. Madsen
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Paper Abstract

We describe the fabrication of smooth electroformed replicas from gold-coated ceramic and lacquer-polished glass mandrels. We show that lowering the temperature of the plating both improves the surface quality of replicas produced from lacquer-polished substrates, although not to the levels that can be achieved using ceramic substrates. The low surface roughness and high ductility of electroforms make them attractive alternatives to conventional silicon and mica substrates for the production of bent and conformable multilayer optics. We describe preliminary work on multilayer coating an electroform produced from a sapphire master.

Paper Details

Date Published: 1 February 1994
PDF: 7 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167243
Show Author Affiliations
Melville P. Ulmer, Northwestern Univ. (United States)
Robert I. Altkorn, Northwestern Univ. (United States)
Rudy H. Haidle, Northwestern Univ. (United States)
David W. Madsen, Moxtek Inc. (United States)

Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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