We give an experimental study of soft x-ray diffraction by various laminar multilayer amplitude grating mirrors made by electron beam lithography. The +1, 0, -1 diffraction order efficiencies in the grating rule scan model and their positions were measured using synchrotron radiation on the Super-Aco at L.U.R.E in the X-UV region, particularly above the silicon L edge. These efficiencies were compared with values obtained in the detector scan mode. Their diffraction pattern were analyzed and discussed with a model. We describe a modular X-UV spectrogoniometer (0 - 20 goniometer).

Date Published: 1 February 1994
PDF: 12 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167217

Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)