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Proceedings Paper

Determination of interfacial roughness correlation in W/C multilayer films: comparison using soft and hard x-ray diffraction
Author(s): Don E. Savage; Yew-H. Phang; J. J. Rownd; James F. MacKay; Max G. Lagally
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Paper Abstract

Interfacial roughness correlation in W/C multilayer films with periods of 23 angstroms, 30 angstroms, and 37 angstroms is examined with x-ray diffraction using (lambda) in the 10 angstroms to 13 angstroms range and (lambda) equals 1.54 angstroms. Transverse scans through multilayer Bragg reflections are analyzed to determine the magnitude and lateral correlation length of the component of interfacial roughness that is perfectly correlated through the multilayer stack. The results are independent of wavelength, even though hard x rays sample match more deeply into the film, indicating that interfacial roughness is not changing through these films.

Paper Details

Date Published: 1 February 1994
PDF: 13 pages
Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167208
Show Author Affiliations
Don E. Savage, Univ. of Wisconsin/Madison (United States)
Yew-H. Phang, Univ. of Wisconsin/Madison (United States)
J. J. Rownd, Univ. of Wisconsin/Madison (United States)
James F. MacKay, Univ. of Wisconsin/Madison (United States)
Max G. Lagally, Univ. of Wisconsin/Madison (United States)

Published in SPIE Proceedings Vol. 2011:
Multilayer and Grazing Incidence X-Ray/EUV Optics II
Richard B. Hoover, Editor(s)

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