Share Email Print
cover

Proceedings Paper

Spatial scanning microspectrophotometer
Author(s): Alexander N. Magunov; A. Y. Gasilov
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The automated optical system for the control of spatial distribution of the optical parameters of solids is developed. The possibilities of spectrophotometric method for detection of the low- contrast geometrical and physical inhomogeneities of dielectric, semiconducting and metal materials are investigated.

Paper Details

Date Published: 31 December 1993
PDF: 13 pages
Proc. SPIE 2161, CIS Selected Papers: Photometry, (31 December 1993); doi: 10.1117/12.166355
Show Author Affiliations
Alexander N. Magunov, Institute of Microelectronics (Russia)
A. Y. Gasilov, Institute of Microelectronics (Russia)


Published in SPIE Proceedings Vol. 2161:
CIS Selected Papers: Photometry
Leonid S. Ushakov, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray