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Proceedings Paper

Fabrication of diffractive optical elements for x-ray range
Author(s): Yu A. Agafonov; Sergey V. Babin; Alexei I. Erko; A. A. Shestakov; Igor A. Schelokov
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Paper Abstract

Problems of microelectronics technology applications for diffractive optical elements fabrication have been considered. The results on x-ray diffractive focusing elements are described: amplitude and phase-contrast Fresnel zone plates as well as freestanding gold gratings. The creation of reflected Bragg-Fresnel lenses for soft x-ray range was made on the basis of multilayer x-ray mirrors. Considerable attention was paid to the correction of different distortion factors involved in the electron beam lithography process.

Paper Details

Date Published: 15 December 1993
PDF: 8 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165701
Show Author Affiliations
Yu A. Agafonov, Institute of Microelectronics Technology (Russia)
Sergey V. Babin, Physics and Technology Institute (Russia)
Alexei I. Erko, Institute of Microelectronics Technology (Russia)
A. A. Shestakov, Institute of Microelectronics Technology (Russia)
Igor A. Schelokov, Institute of Microelectronics Technology (Russia)

Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher Jr.; Chandrasekhar Roychoudhuri, Editor(s)

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