Share Email Print
cover

Proceedings Paper

Preshaping photoresist for refractive microlens array fabrication
Author(s): Theresa Rubico Jay; Margaret B. Stern
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Refractive microlenses are fabricated by the P2ROM (Preshaped Photoresist Refractive Optics by Melting) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200 micrometers diameter microlenses with speeds between F/1.5 and F/5. Interferometric surface measurements, used to determine optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by this method.

Paper Details

Date Published: 15 December 1993
PDF: 8 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165698
Show Author Affiliations
Theresa Rubico Jay, Lincoln Lab./MIT (United States)
Margaret B. Stern, Lincoln Lab./MIT (United States)


Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher Jr.; Chandrasekhar Roychoudhuri, Editor(s)

© SPIE. Terms of Use
Back to Top