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Proceedings Paper

Production and control of refractive and diffractive microlenses
Author(s): Johannes Schwider; Stefan Haselbeck; Horst Schreiber; Horst Sickinger; Oliver R. Falkenstoerfer; Norbert Lindlein; Andreas Zoeller; Helmut Haidner; Peter Kipfer; M. Heissmeier; Tuula Keinonen; John T. Sheridan; Sven Brinkmann; Norbert Streibl
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Paper Abstract

Refractive or diffractive microlenses have already been reported. Here we discuss two examples of microlenses where the generation process and the interferometric control are strongly interwoven. For refractive lenses we use lenses melted in photoresist and also reactive ion etched samples. The control is done with the help of a phase shifting interference microscope of the Mach-Zehnder type. We developed an evaluation software under Windows. The software allows for the evaluation of the wave aberrations and related functions as are psf and otf.

Paper Details

Date Published: 15 December 1993
PDF: 12 pages
Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165679
Show Author Affiliations
Johannes Schwider, Univ. Erlangen (Germany)
Stefan Haselbeck, Univ. Erlangen (Germany)
Horst Schreiber, Univ. Erlangen (Germany)
Horst Sickinger, Univ. Erlangen (Germany)
Oliver R. Falkenstoerfer, Univ. Erlangen (Germany)
Norbert Lindlein, Univ. Erlangen (Germany)
Andreas Zoeller, Univ. Erlangen (Germany)
Helmut Haidner, Univ. Erlangen (Germany)
Peter Kipfer, Univ. Erlangen (Germany)
M. Heissmeier, Univ. Erlangen (Germany)
Tuula Keinonen, Univ. Erlangen (Germany)
John T. Sheridan, Univ. Erlangen (Germany)
Sven Brinkmann, Univ. Erlangen (Germany)
Norbert Streibl, Univ. Erlangen (Germany)

Published in SPIE Proceedings Vol. 1992:
Miniature and Micro-Optics and Micromechanics
Neal C. Gallagher Jr.; Chandrasekhar Roychoudhuri, Editor(s)

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