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Proceedings Paper

Interference methods for surface roughness measurement
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Paper Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop the methods for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) (psi) O2 < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, thin plane-parallel plate surfaces, plane low-reflectance surfaces, and arbitrarily shaped surfaces. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .

Paper Details

Date Published: 10 December 1993
PDF: 7 pages
Proc. SPIE 2108, International Conference on Holography, Correlation Optics, and Recording Materials, (10 December 1993); doi: 10.1117/12.165389
Show Author Affiliations
Oleg V. Angelsky, Chernovtsy Univ. (Ukraine)
Peter P. Maksimyak, Chernovtsy Univ. (Ukraine)


Published in SPIE Proceedings Vol. 2108:
International Conference on Holography, Correlation Optics, and Recording Materials
Oleg V. Angelsky, Editor(s)

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