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Proceedings Paper

Design and construction of large-aperture reflective interferometers
Author(s): John J. Nemechek
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Paper Abstract

Phase measuring interferometry is well established as the premier measurement technology in support of optical component fabrication. Commercial instruments are available that provide surface measurements over a range of radii and diameters. However, microlithographic lenses have increased in complexity and scale to the point that most commercial instruments fail to provide adequate surface coverage. Most severe is the ability to measure large diameter, convex surfaces. Anticipating the demands of today's microlithographic lens production, Tropel began design and construction of a new class of phase measuring interferometers in 1990. As a catadioptric design, these instruments feature a large spherical mirror to accomplish their purpose. This paper reviews the optical design of the large aperture reflective interferometer (LARI), and various considerations in their construction.

Paper Details

Date Published: 25 November 1993
PDF: 6 pages
Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); doi: 10.1117/12.163635
Show Author Affiliations
John J. Nemechek, GCA Tropel, a Unit of General Signal (United States)

Published in SPIE Proceedings Vol. 2000:
Current Developments in Optical Design and Optical Engineering III
Robert E. Fischer; Warren J. Smith, Editor(s)

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