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Proceedings Paper

Thin polyimide films prepared by a vacuum deposition process (VDP): morphology and properties
Author(s): Gentsho V. Danev; Erintche M. Spassova; Dimitre Z. Dimitrov; Ivo P. Doudevski
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Paper Abstract

Thin polyimide films, prepared by vacuum deposition, have been investigated. The influence of the nature of the monomers, evaporation rate, treatment of the substrate and post- preparation treatment (imidization) of the layers on the structure are discussed. Infrared spectra and thermogravimetric analysis results are consistent with the interpretation that VDP films produced are polyamic acid curable to polyimide. The morphology and properties have been characterized by electron microscopy.

Paper Details

Date Published: 19 November 1993
PDF: 6 pages
Proc. SPIE 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II, (19 November 1993); doi: 10.1117/12.162734
Show Author Affiliations
Gentsho V. Danev, Central Lab. of Photoprocesses (Bulgaria)
Erintche M. Spassova, Central Lab. of Photoprocesses (Bulgaria)
Dimitre Z. Dimitrov, Central Lab. of Photoprocesses (Bulgaria)
Ivo P. Doudevski, Sofia Univ. (Bulgaria)

Published in SPIE Proceedings Vol. 1985:
Physical Concepts and Materials for Novel Optoelectronic Device Applications II
Fabio Beltram; Erich Gornik, Editor(s)

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