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Proceedings Paper

Development of thin-film polycrystalline silicon solar cells by a solid-phase crystallization (SPC) method
Author(s): Takao Matsuyama; Toshiaki Baba; Makoto Tanaka; Masao Isomura; Shinya Tsuda; Shoichi Nakano; Yukinori Kuwano
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Paper Abstract

Polycrystalline silicon (poly-Si) thin films prepared by the solid phase crystallization (SPC) method were studied for photovoltaic materials. To improve the properties of the poly-Si thin film, a-Si films suited to the solid phase crystallization were investigated. It was found that TA/TO (peak height ratio of TA peak and TO peak) in Raman spectra of a-Si films had the good correlation with the average grain size, and a factor for the enlargement of grain size was an increase of distortion energy stored in a-Si films. The first adoption of a textured substrate was also performed, which had effects on the enlargement of grain size in poly-Si thin films be the SPC method. By applying the a-Si films with large TA/TO value on textured substrate, the n-type poly-Si thin-film with the grain size of 6 micrometers was fabricated and this film showed the Hall mobility of 623 cm2/Vs (electron density: 3.0 X 1015 cm-3). A new heterojunction technology, which was called by 'Artificially Constructed Junction (ACJ)', was developed by depositions of thin a-Si films on single- crystalline silicon (c-Si). In a solar cell using this technology, a high conversion efficiency of 18.7% was achieved. This is the highest value ever reported for solar cells in which the junctions were fabricated at a low temperature of less than 200 degree(s)C. In a thin-film poly- Si solar cell (thickness: 10 micrometers ) applying this technology, a conversion efficiency of 6.3% was also obtained and a collection efficiency of 51% was achieved at a wavelength of 900 nm. This high value attributes to the hole diffusion length of 11 micrometers , which is longer than the poly-Si thickness.

Paper Details

Date Published: 22 October 1993
PDF: 12 pages
Proc. SPIE 2017, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XII, (22 October 1993); doi: 10.1117/12.161960
Show Author Affiliations
Takao Matsuyama, Sanyo Electric Co., Ltd. (Japan)
Toshiaki Baba, Sanyo Electric Co., Ltd. (Japan)
Makoto Tanaka, Sanyo Electric Co., Ltd. (Japan)
Masao Isomura, Sanyo Electric Co., Ltd. (Japan)
Shinya Tsuda, Sanyo Electric Co., Ltd. (Japan)
Shoichi Nakano, Sanyo Electric Co., Ltd. (Japan)
Yukinori Kuwano, Sanyo Electric Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 2017:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XII
Carl M. Lampert, Editor(s)

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