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Proceedings Paper

Research and development of a new series of measuring instruments directly tracing to the wavelength
Author(s): Hui-Fu Qiu; Xue-Neng Zhang
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Paper Abstract

High uniformity of graduation is obtained in the wavelength unit length scales of measuring instrument. Developement of such series of instruments has been successful in new models of grating universal metroscope and vertical laser metroscope. The uniformity of spacing of wavelength grating developed is less than 0.03 μm. The uncertainty of these kinds of instruments is ±(O.2/O.3±2x 1OL) m. The real time comprehensive compensating method of measurement used in them can effectively compensate the linear systematic error and reduce requirements of temperature control of measuring environment.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156370
Show Author Affiliations
Hui-Fu Qiu, Beijing Institute of Engineering Industry (China)
Xue-Neng Zhang, Shanghai Second Optical Instrument Factory (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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