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Proceedings Paper

New scheme of measuring roughness
Author(s): Ben-He Jiang; Wenyi Chen; Xue-Jin Liang; Sheng-Jun Du
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Paper Abstract

The monochromatic light projects on Michelso interference device and the detective plane on output obtains the interference pattern. Processing the information of the changes of the interference pattern and intensity distribution we can devise a new instrument for measuring roughness and obtain precise measured results.

Paper Details

Date Published: 22 September 1993
PDF: 2 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156320
Show Author Affiliations
Ben-He Jiang, Shandong Univ. (China)
Wenyi Chen, Shandong Univ. (China)
Xue-Jin Liang, Shandong Univ. (China)
Sheng-Jun Du, College of Shandong Architectural Engineering (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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