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Proceedings Paper

Alignment measurement with laser diode
Author(s): Shu-Yuan Ma; Jinwen Liang
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Paper Abstract

The alignment technique is very important to the field of geometrical measurements, especially for large scale measurements. This technique can be used to solve a lot of problems found in size or profile measurements. At present the light beam of He-Ne laser is mainly used in the alignment devices. In such devices, the light beam drift and the mechanisms distortion caused by temperature change of light source is one of the main factors affecting the alignment precision. This paper presents an alignment device with laser diode. Since the laser diode has advantages of small size and easy use, and the temperature can be controlled easily, so the alignment precision can be obtained easily and the apparatus will become compact. The paper showed the influence of temperature change on the alignment precision and the methods of temperature control. Thea alignment precision was evaluation to be 1x10-6 from the results of experiments.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156299
Show Author Affiliations
Shu-Yuan Ma, Beijing Institute of Technology (China)
Jinwen Liang, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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