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Proceedings Paper

Measurement of straight-motion accuracy
Author(s): Akira Shimokohbe; Kaiji Sato; Akira Toyama; Joji Yamaguchi
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Paper Abstract

Ultra-precision machine components such as linear motion tables and rotary bearings are necessary to realize ultra-precision mechanisms and machines. In order to produce these components the evaluation of their accuracy is essential. This paper describes a measuring method of straight motion accuracy of a linear table with one meter working length. The method is based on the sequential three-point one but in the method it is possible to eliminate the influence of the zero-inequality of sensors. The method also makes use of merits of the conventional reversal one but there is no need to reverse a long straightedge.

Paper Details

Date Published: 22 September 1993
PDF: 9 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156297
Show Author Affiliations
Akira Shimokohbe, Tokyo Institute of Technology (Japan)
Kaiji Sato, Tokyo Institute of Technology (Japan)
Akira Toyama, Tokyo Institute of Technology (Japan)
Joji Yamaguchi, NTT Interdisciplinary Research Lab. (Japan)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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