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Proceedings Paper

Measurement principle and error analysis for an optical heterodyne profilometer
Author(s): Tao Chen; Zhu Li; Jiabi Chen
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Paper Abstract

In this paper an optical profilometer based on the principle of heterodyne interferometry has been developed. A new optical path design with a two-parallel-path is presented. This instrument will be insensitive to the vibration the air turbulence and no high precision reference surface is needed. The measurement results show that the vertical resolution is better than mm and the lateral resolution is less than 1 I. L m. Based on this design we also analyze its potential errors such as the error caused by the distance between two parallel optical paths that caused by the phase detection system and those casued by the optical design and others. The stability and the repeatability of the instrument are also evaluated.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156295
Show Author Affiliations
Tao Chen, Huazhong Univ. of Science and Technology (China)
Zhu Li, Huazhong Univ. of Science and Technology (China)
Jiabi Chen, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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