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Proceedings Paper

Measurement and rectification of the response characteristic of piezoelectric transducers
Author(s): Ju-Xiang Wang; Zhu Li; Jiangming Ni; Xiandeng Pei
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Paper Abstract

The piezoelectric transducer ( PZT for short ) is widely used in precision measurement as an actuator or a sensor1 . While developing the noncontact measuring instrument of disk surface roughness we employed PZT as the actuator of phasemodulation. It has been confirmed that the actuator is satisfactory in realizing precision measurement of the surface roughness with roughness Ra from 0. 16 to 0. 01 m. This paper primarily presents the measurement and rectification of the response characteristics of PZT after briefly introducing the design and process. The experiments and analysis show that the linearity of the response characteristics could be improved to 1. 08 by applying a suitable series capacitor which gives good precision support for the instrument. KEY WORDS: Precision measurement Measuring technique Rectification

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156292
Show Author Affiliations
Ju-Xiang Wang, Huazhong Univ. of Science and Technology (China)
Zhu Li, Huazhong Univ. of Science and Technology (China)
Jiangming Ni, Huazhong Univ. of Science and Technology (China)
Xiandeng Pei, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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