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Proceedings Paper

Infrared multiwavelength He-Ne laser absolute-distance interferometer for diameter measurement of large-scale workpiece
Author(s): Zheng You; WeiMing Ren; Jinwen Liang
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Paper Abstract

This paper describes a new type multiwavelength HeNe laser interferometer for diameter measurement of large scale work piece. The laser can oscillate on two wavelength 3. 39l2i and 3. 3922pm simultaneously. By switching between two equal intensity state it provides a two order wavelength hierarchy pyramid from lm to 3. 39l2um. The range of this system is up to 20m and the accuracy 5jim+l. 5*lO6L. ( L is the measured distance

Paper Details

Date Published: 22 September 1993
PDF: 6 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993);
Show Author Affiliations
Zheng You, Tsinghua Univ. (China)
WeiMing Ren, Tsinghua Univ. (China)
Jinwen Liang, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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