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Proceedings Paper

Understanding the novolak synthesis reaction
Author(s): Leonard E. Bogan Jr.
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Paper Abstract

We describe new tools for the characterization of novolac resins, for the understanding of the novolac synthesis reaction, and for the prediction of resin structures. These tools have been used to optimize the performance of photoresists for microlithography. The current state-of- the-art describes novolac copolymer compositions as the ratio of monomers charged in the reaction, even though it is well known that the actual product composition is quite different. Quantitative 13C NMR spectroscopy provides a direct method for accurately determining copolymer composition by integrating methyl carbon resonances. By using this method to analyze the results of competition reactions, relative monomer and site reactivities for phenol and the cresols with formaldehyde have been determined. These observed reactivities have been used in a simple, kinetic model to accurately predict copolymer composition, branch density, and molecular weight.

Paper Details

Date Published: 15 September 1993
PDF: 6 pages
Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); doi: 10.1117/12.154791
Show Author Affiliations
Leonard E. Bogan Jr., Rohm and Haas Co. (United States)

Published in SPIE Proceedings Vol. 1925:
Advances in Resist Technology and Processing X
William D. Hinsberg, Editor(s)

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