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Proceedings Paper

Dynamical focusing electro-optical sensor system for measuring surface contours
Author(s): Rong Gu; Chenjun Xu; Liming Lio; Guan-Qun Shen
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Paper Abstract

A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.

Paper Details

Date Published: 13 August 1993
PDF: 6 pages
Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); doi: 10.1117/12.150666
Show Author Affiliations
Rong Gu, Shanghai Institute of Laser Technology (China)
Chenjun Xu, Shanghai Institute of Laser Technology (China)
Liming Lio, Shanghai Institute of Laser Technology (China)
Guan-Qun Shen, Shanghai Institute of Laser Technology (China)

Published in SPIE Proceedings Vol. 2053:
Optical Storage (ISOS '92)
Fuxi Gan, Editor(s)

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