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Proceedings Paper

Measurement of surface roughness of optical disk substrates by differential polarization interferometry
Author(s): Wendong Xu; Xishan Li
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Paper Abstract

This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 micrometers . It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.

Paper Details

Date Published: 13 August 1993
PDF: 8 pages
Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); doi: 10.1117/12.150655
Show Author Affiliations
Wendong Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Xishan Li, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 2053:
Optical Storage (ISOS '92)
Fuxi Gan, Editor(s)

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